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ISO14644 Classification
<
CLASS
Number
of
Particles
per
Cubic
Meter
by
Micrometer
Size
0.1
um
0.2
um
0.3
um
0.5
um
1
um
5
um
ISO
1
10
2
ISO
2
100
24
10
4
ISO
3
1000
237
102
35
8
ISO
4
10000
2370
1020
352
83
ISO
5
100000
23700
10200
3520
832
29
ISO
6
1000000
237000
102000
35200
8320
293
ISO
7
352000
83200
2930
ISO
8
3520000
832000
29300
ISO
9
35200000
8320000
2
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